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Optical Systems and Chucks for Semiconductor
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For the semiconductor market we offer:
- mask/reticle/wafer holder
- inspection systems
- mask writer
We serve the market with development, design and production of high precision key components, lens systems, objectives and clean room assembling and adjustment of complete modules and sub-systems. |
It starts with our customers' idea and the fully understanding of our customers' needs, in-house feasibility and specification, design and prototyping and - after a final design review - it results in manufacturing and management of after-sales services for our customers.
Fast, flexible, competent and reliable.
- We provide highly precise optics and opto-mechanical systems for the lithography market including stages for wafers and masks.
- We produce complex assemblies for back-end and front-end applications, for excimer lasers, mask and wafer inspection systems.
- We support the next generation of lithography tools by producing vacuum and electrostatic chucks for a wide range of different applications.
At a glance: - Extraordinary high flatness
- Deterministic polishing techniques using computer controlled polishing, magneto-rheological finishing or ion-beam-figuring
- Light weighting up to 95% depending on material
- cooling structures, anti sticking coatings/structures
- anodic bonding
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Deutsche Version
